What Is Scratch/Dig Substrates? 

Scratch/dig specifications define the allowable surface defects on semiconductor wafers and optical substrates. Researchers often require specific scratch/dig values when ordering fused silica wafers, silicon wafers, sapphire, quartz, and other materials used in photonics, MEMS, laser systems, and semiconductor devices. UniversityWafer, Inc. supplies polished substrates with custom scratch/dig requirements, thickness tolerances, and surface finishes for research and production applications.

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Scratch/Dig Specifications for Fused Silica and Optical Substrates

Researchers often need polished wafers with controlled scratch/dig specifications for optical, semiconductor, MEMS, and photonics applications. Scratch/dig requirements help define the allowable surface defects on substrates such as fused silica wafers, quartz, sapphire, and silicon wafers.

A corporate researcher requested help with the following fused silica wafer specification:

“Do you have fused quartz wafers? I am interested in availability, cost, and lead time for 100mm fused silica wafers at 500 ± 25µm thickness, polished on both sides.

I would also like to know the thickness tolerance, surface smoothness, and whether the wafer has a flat like a typical silicon wafer. Specifically, we need substrates with a 60/40 scratch-dig surface quality according to MIL-PRF-13830 style optical inspection requirements.”

Reference #95768 for specs and pricing.

Common Scratch/Dig Substrate Requirements

  • Fused silica or fused quartz material
  • 100mm diameter wafers
  • 500 ± 25µm thickness
  • Double-side polished surface
  • 60/40 scratch-dig quality
  • Custom flats, tolerances, and surface roughness

UniversityWafer, Inc. can help quote custom optical substrates, polished wafers, fused silica, quartz, sapphire, and silicon materials with the scratch/dig specification required for your research.

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What Does Scratch/Dig Mean for Semiconductor and Optical Substrates?

In semiconductor wafers and optical substrates, scratch/dig specifications define the maximum allowable surface defects on polished materials. These standards are commonly applied to silicon wafers, fused silica, sapphire, quartz, and other optical substrates used in photonics, MEMS, sensors, and semiconductor devices.

Surface quality directly affects device yield, optical transmission, thin film deposition, and overall substrate reliability. Lower scratch/dig values correspond to smoother surfaces and fewer defects.

What Are Scratches and Digs?

A scratch is a linear surface defect caused by polishing, cleaning, or handling. A dig is a small pit or indentation created by particles or imperfections during manufacturing.

  • Scratch: Linear defect affecting surface quality and film uniformity.
  • Dig: Small circular pit measured by diameter and depth.
  • Lower numbers mean better surface quality.

Common Scratch/Dig Specifications

Scratch/Dig Typical Use
60/40 General optical and semiconductor applications
40/20 High-quality polished substrates
20/10 Precision optics and laser systems
10/5 Premium semiconductor and photonics applications

Why Is Scratch/Dig Important?

Surface defects can affect device performance, optical clarity, and manufacturing yield. Tight scratch/dig requirements are especially important for:

  • Thin film deposition
  • Photolithography processes
  • MEMS devices
  • Optical windows and laser components
  • Photonic devices
  • RF and high-frequency semiconductor devices
  • Sensors and imaging systems

Scratch/Dig Applications

Different applications require different surface quality levels. Advanced semiconductor devices and optical systems generally require low scratch/dig values to minimize scattering and maximize performance.

Industry Standards for Scratch/Dig Specifications

Scratch/dig requirements are commonly specified according to industry standards including:

  • MIL-PRF-13830B
  • ANSI/OEOSC OP1.002-2009
  • Custom optical and semiconductor specifications

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