Wafer Cassettes for University Researchers and Industry

Wafer Cassettes in Semiconductor Manufacturing

Overview

Wafer cassettes are essential components in semiconductor manufacturing, designed to securely hold and transport silicon wafers during various processing stages. They ensure the protection and proper alignment of wafers, minimizing contamination and mechanical damage.

Materials and Design

Wafer cassettes are manufactured from a variety of materials tailored to specific semiconductor applications. Stainless steel wafer cassettes can withstand high semiconductor baking temperatures up to 450°C. They are fully conductive, non-deforming, non-contaminating, non-outgassing, allow uniform heat distribution, and have a Rockwell hardness rating much softer than silicon.

Applications

Wafer cassettes are utilized in various semiconductor processes, including cleaning, etching, deposition, and inspection. Their design ensures compatibility with automated handling systems, enhancing manufacturing efficiency and yield.

Customization

Manufacturers offer customizable wafer cassettes to meet specific process requirements. Features such as increased chemical flow-through dynamics and reduced material trap points can be incorporated to optimize performance.

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