Buy Semiconductor and Wafer Processing Quartz Boats

university wafer substrates

Quartz Boats to Handle Mostly Square Parts 

A PhD student requested a quote for the follwoing.

I want quartz boats to handle mostly square parts.  Either one  boat or multiple boats for the following:

  • 36 pcs 2" x 2"
  • 36 pcs 2.25 "x 2.25"
  • 24 pcs 2.3" x 2.9"
  • 18 pcs 3" x 3"
  • 12 pcs 3.7" x 3.7"
  • 9 pcs 4"x4"
  • 9 pcs 4 " diameter
  • Plus 3 foot quartz push/pull rod.

We bought a small diffusion furnace to preheat ceramic substrates before we put them in our ebeam evaporator to metalize them. We needed the quartz carriers to slide the substrates in the furnace at 1000 C.

UniversityWafer, Inc. Quoted:

Inquiry No Crystal Material  utline spec
119003 quartz boat square 2" x 2"
119003 quartz boat square 2.25 "x 2.25"
119003 quartz boat square 2.3" x 2.9"
119003 quartz boat square 3" x 3"
119003 quartz boat square 3.7" x 3.7"
119003 quartz boat square 4"x4"
119003 quartz boat round 4 "

Reference #119003  for specs and pricing.

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Quartz Boat 1200 Degree Centigrade

A PhD professor requested a quote for the following.

We need quartz boats of size 5cm (length) x3cm (maximum width) and 2cm (height) to work at temperature upto 1200 degree Centigrade. Could you please send me specification and price of  such quartz substrate?

Crystal Material  Diameter
quartz boats 5cm (length)x3cm(maximum
width) and 2cm(height)

Reference #121679 for specs and pricing.

Quartz Diffusion Boats for Semiconductor Processing

A postdoc requested a quote for the following.

We need quartz diffusion boats for semiconductor processing. We use following silicon wafers for students training on  semiconductor technology. Our  need is for following. *Wafer thickness ~ 500 /um (slots width >500 /um) *Wafer size  1" dia  *Number of slots on wafer : More than 20 * Temperature upto 1100 degree  centigrade * Boat with a hook at one end to push/pull wafers in the furnace  If you can supply please quote.

Reference #136774 for specs and pricing.

clear quartz boat used in semiconductor processing, shown on a reflective black surface

High-Purity Quartz Boats for Semiconductor and Wafer Processing Quartz boats are precision-engineered containers used in semiconductor manufacturing and chemical processing to securely hold and transport silicon wafers and other substrates during high-temperature processes such as diffusion, oxidation, and annealing. UniversityWafer, Inc. offers premium-grade optical quartz boats and wafer carriers, trusted for their thermal stability, chemical resistance, and purity—available at highly competitive prices for research labs and industrial applications.

What Is A Quartz Boat?

In semiconductors, a quartz boat is a high-purity container or fixture made from fused quartz (SiO₂) used to hold semiconductor wafers during high-temperature processes such as:

  • Oxidation

  • Diffusion

  • Annealing

  • Chemical Vapor Deposition (CVD)

Quartz boat holding silicon wafers inside a horizontal tube furnace for semiconductor processing

Key Characteristics:

  • High thermal resistance: Can withstand temperatures up to ~1200–1300 °C.

  • Chemical inertness: Resistant to most chemicals, especially at high temperatures.

  • Low thermal expansion: Minimizes mechanical stress on wafers during heating/cooling cycles.

  • Non-contaminating: Does not introduce impurities into the process, crucial for maintaining wafer purity.

Common Uses:

  • Horizontal furnaces: Quartz boats are loaded into furnace tubes to carry wafers during oxidation/diffusion.

  • Vertical furnace systems: In this setup, wafers are often loaded vertically with quartz boats suspended on carriers.

  • Wafer loading and transfer: Boats serve as a fixture to safely transfer wafers between process steps.

Typical Design:

  • Grooved slots or ridges to hold individual wafers securely in a vertical or horizontal orientation.

  • Available for various wafer sizes: 2", 4", 6", 8", and 12" are common.